Product Description
PECVD system technique is to make the traditional chemical vapour deposition (CVD) reaction temperature is reduced, most ordinary CVD equipment temperature at 900 ℃ or so, and, in the front of the ordinary CVD device to join the RF radio frequency induction device reaction gas ionization, plasma formation, the activity of plasma is used to promote the reaction, can make chemical vapor deposition temperature down to about 400 ℃, so the system known as the enhanced chemical vapor deposition (PECVD) technique of the system.
| Technical Parameters | Furnace Parts | ||||
| 1 | Chamber model | Open slidable chamber | 2 | Display model | 7 "touch screen |
| 3 | Max temperature | 1200℃ | 4 | Working temperature | ≤1150℃ |
| 5 | Heating rate | Suggess:10℃/Min Max：30℃/Min | 6 | Chamber move | Yes,speed is adjustable |
| 7 | Heating zone length | 200mm | 8 | Tube size | 60*1150 mm |
| 9 | Temperature accuracy | ±1℃ | 10 | Sealing way | Rapid flange seal |
| 11 |
Temperature curve | 30 segments programmable | 12 | Persisting curve | 15 curve |
| 13 | over heat alarm | have | 14 | overcurrent protection | have |
| 15 | Thermocouple Failure Protection | have |
16 | Temperature measure element | K-type thermocouple |
| 17 | Hearth Material | Imported alumina fiber | 18 | Overall dimensions | 1500*600*1000MM |
| Technical Parameters | RF power | ||||
| 1. | Signal frequency | 13.56 MHz±0.005% | 2. | outout | 5W-300W |
| 3 | Power stability | ±0.1% | 4 | efficiency | >=70% |
| 5 | Power factor | >=90% | 6 | Cooling way | Forced air cooling |
| Technical Parameters | Vacuum part | ||||
| 1 | power | 500W | 2 | Extraction rate | 2L\s |
| 3 | Ultimate vacuum | 4*10-2 Pa | |||
| Technical Parameters | Pneumatic system | ||||
| 1 | 1 ~ 3 road mass flowmeter is optional | 2 |
accuracy：±1.5% | ||
| 3 | Repeat accuracy：±0.2% | 4. | Operating differential pressure range：0.1～0.5 MPa | ||
| The whole machine system characteristics | |||||
| 1 | Positive pressure measurement | -100Kpa---100Kpa | 2 | Vacuum measurement | 10-2 Pa ～100Kpa（Support Ar measurement) |
| 3 | Positive pressure protection | support | 4 | Pressure constant | support |
| 5 | Intelligent gas path | support | 6 | Gas circuit timing | support |
| 7 | RF working time setting | support | 8 | Movement speed adjustment | support |
| 9 | highest vacuum | 4.8×10-3 Pa | 10 | Software functions | 1: rf power open time, can be set, time to stop automatically after the radio frequency power supply. |
| 2: automatic gas switch function, different temperature in different gases, or according to your requirements (optional) 3: automatic detection of vacuum degree, according to the size of the vacuum degree, automatic startup radio frequency power supply. 4: vacuum pump automatic start, according to the degree of vacuum, the system automatically determine whether need to start the vacuum pump. 5. The overpressure protection. 6: other functions according to your requirements | |||||
| FOB 18000 /USD | |||||
| Choose a different RF power, vacuum requirements, the number of air and software functions are not the same price， | |||||
Name: Tube furnace
Brand: Chengyi
Original: China
The latest models PECVD for ChengYi technique, combining the most domestic manufacturers of tubular PECVD system technique,
the advantages of touch screen on a key control, the experiments prove that this structure sedimentation speed, film quality is good, pinhole is less, not easy to crack
And the control part adopts ChengYi independent research and development of the experimental furnace AIO automatic intelligent control system
make the operation more convenient, more powerful.
Certifications
Our Service
* Inquiry and consulting support.
* Sample testing support.
* View our Factory.
* Training how to instal the machine, training how to use the machine.
* Engineers available to service machinery overseas.
Packing & Delivery
1.by courier, like DHL,UPS,FEDEX,etc.usually,3-4 days to arrive.
2.by air to the air port,usually5-7 days to arrive.
3.by sea to sea port,ususally,15-30 days to arrive.
if you delivery time is very urgent, we suggest you choose by courier or by air.
if it not very urgent,we will suggest you choose by sea,it is very cheap
Henan Chengyi Equipment Science an Technology Ltd. is a manufacturer devoted into the research, development and produce of lab furnace and industrial furnace.
In 2009, begin to produce furnaces for university research institutes and military testing departments.
In 2013, establish the project of designing industrial continuous production furnaces.
In 2014, Henan Chengyi Laboratory Equipment Ltd. is established, aiming at the developing and sales of lab furnace.
In 2015, Henan Chengyi Equipment Science and Technology Ltd. is established to develop high technology lab furnace and industrial furnace.
In 2016, Chengyi actively exploring overseas market and got the import & export right. Chengyi Brand is praised by customers all around the world.
Our CustomerRelated Products
91.8% Response Rate
91.8% Response Rate
91.8% Response Rate
6.Other question
Please email me or contact me about details.
Tel: 86-0371-55027794
Fax: 86-0371-55027786
Whats:+8613071020069
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